Characterization of high quality tantalum pentoxide film...

Thin Solid Films 2009 Vol. 518; Iss. 1

Characterization of high quality tantalum pentoxide film synthesized by oxygen plasma enhanced pulsed laser deposition

Xiliang He, Jiehua Wu, Xiaomin Li, Xiangdong Gao, Lingnan Wu, Lili Zhao, Xiaoyan Gan, Fuwei Zhuge
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Volume:
518
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.06.041
File:
PDF, 539 KB
english, 2009
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