Stability and degradation of plasma deposited boron nitride...

Thin Solid Films 2009 Vol. 518; Iss. 1

Stability and degradation of plasma deposited boron nitride thin films in ambient atmosphere

Tamila Aliyeva Anutgan, Mustafa Anutgan, Ismail Atilgan, Bayram Katircioglu
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Volume:
518
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2009.06.043
File:
PDF, 1.17 MB
english, 2009
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