A multilayer model for describing hardness variations of aged porous silicon low-dielectric-constant thin films
K. Rahmoun, A. Iost, V. Keryvin, G. Guillemot, N.E. Chabane SariVolume:
518
Year:
2009
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2009.07.040
File:
PDF, 1.16 MB
english, 2009