Increase of SiC Substrate Resistance Induced by Annealing

Materials Science Forum 2010 / 4 Vol. 645-648

Increase of SiC Substrate Resistance Induced by Annealing

Straubinger, Thomas L., Woodin, Richard L., Witt, T., Shovlin, J., Dolny, Gary M., Sasahara, P., Schmitt, Erwin, Weber, Arnd Dietrich, Casady, Jeff B., Casady, Janna B.
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Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.223
Date:
April, 2010
File:
PDF, 621 KB
english, 2010
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