Effects of argon and oxygen flow rate on water vapor barrier properties of silicon oxide coatings deposited on polyethylene terephthalate by plasma enhanced chemical vapor deposition
Sung-Ryong Kim, Moinul Haque Choudhury, Won-Ho Kim, Gon-Ho KimVolume:
518
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2009.07.147
File:
PDF, 316 KB
english, 2010