Effect of the substrate temperature on zirconium oxynitride...

Effect of the substrate temperature on zirconium oxynitride thin films deposited by water vapour–nitrogen radiofrequency magnetron sputtering

M.A. Signore, A. Rizzo, L. Tapfer, E. Piscopiello, L. Capodieci, A. Cappello
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Volume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.07.153
File:
PDF, 359 KB
english, 2010
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