Fourier transform infrared studies of the aluminum chemical...

Fourier transform infrared studies of the aluminum chemical vapor deposition using aluminum boro-hydride trimethylamine

S.W. Kang, Y.J. Park, J.Y. Yang, Y.H. Shin, J.Y. Yun
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Volume:
518
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2009.07.159
File:
PDF, 1.44 MB
english, 2010
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