Development of density-inclination plasmas for analysis of...

Thin Solid Films 2009 Vol. 518; Iss. 3

Development of density-inclination plasmas for analysis of plasma nano-processes via combinatorial method

Yuichi Setsuhara, Katsuhisa Nagao, Masaharu Shiratani, Makoto Sekine, Masaru Hori
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Volume:
518
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.07.162
File:
PDF, 261 KB
english, 2009
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