Effect of bias in patterning diamond by a dual electron...

Effect of bias in patterning diamond by a dual electron cyclotron resonance–radio-frequency oxygen plasma

L. Wang, X.D. Zhu, B. Ke, T.L. Ni, F. Ding, M.D. Chen, X.H. Wen, H.Y. Zhou
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Volume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.07.182
File:
PDF, 406 KB
english, 2010
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