Polysiloxane Coatings on Biomedical Micro Devices: Plasma Etching and Properties of Protection Layer
Szmigiel, Dariusz, Domański, Krzysztof, Grabiec, PiotrVolume:
57
Year:
2008
Language:
english
Journal:
Advances in Science and Technology
DOI:
10.4028/www.scientific.net/AST.57.220
File:
PDF, 908 KB
english, 2008