Atomic layer deposited aluminum oxide barrier coatings for...

Thin Solid Films 2010 Vol. 518; Iss. 10

Atomic layer deposited aluminum oxide barrier coatings for packaging materials

Terhi Hirvikorpi, Mika Vähä-Nissi, Tuomas Mustonen, Eero Iiskola, Maarit Karppinen
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Volume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.08.025
File:
PDF, 490 KB
english, 2010
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