Native oxide consumption during the atomic layer deposition...

Thin Solid Films 2010 Vol. 518; Iss. 8

Native oxide consumption during the atomic layer deposition of TiO2 films on GaAs (100) surfaces

Theodosia Gougousi, John W. Lacis
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Volume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.08.028
File:
PDF, 423 KB
english, 2010
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