Stabilization and operation of porous silicon photonic structures from near-ultraviolet to near-infrared using high-pressure water vapor annealing
Bernard Gelloz, Nobuyoshi KoshidaVolume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.08.043
File:
PDF, 696 KB
english, 2010