A study of deposition of ITO films on organic layer using...

Thin Solid Films 2010 Vol. 518; Iss. 11

A study of deposition of ITO films on organic layer using facing target sputtering in Ar and Kr gases

Hao Lei, Keisuke Ichikawa, Yoichi Hoshi, Meihan Wang, Takayuki Uchida, Yutaka Sawada
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Volume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.08.059
File:
PDF, 433 KB
english, 2010
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