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Fabrication of epitaxial ZnO films by atomic-layer deposition with interrupted flow
Ching-Shun Ku, Jheng-Ming Huang, Chih-Ming Lin, Hsin-Yi LeeVolume:
518
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.09.018
File:
PDF, 369 KB
english, 2009