Effects of Laser in situ annealing on crystal quality of...

Thin Solid Films 2010 Vol. 518; Iss. 14

Effects of Laser in situ annealing on crystal quality of NiSi film grown on Si(001) substrate

Li Wan, Xuefei Zhang, Bo Tang, Yiming Ren, Xinhong Cheng, Dapeng Xu, Hijun Luo, Yunmi Huang
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Volume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.09.084
File:
PDF, 631 KB
english, 2010
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