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Annealing effect on the structural, mechanical and electrical properties of titanium-doped diamond-like carbon films
Yu-Hung Lin, Hong-Da Lin, Chun-Kuo Liu, Meng-Wen Huang, Ya-Chi Chen, Jiann-Ruey Chen, Han C. ShihVolume:
518
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.09.096
File:
PDF, 466 KB
english, 2009