Fabrication of nano-scale phase change materials using...

Thin Solid Films 2010 Vol. 518; Iss. 20

Fabrication of nano-scale phase change materials using nanoimprint lithography and reactive ion etching process

Ki-Yeon Yang, Jong-Woo Kim, Sung-Hoon Hong, Jae-Yeon Hwang, Heon Lee
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Volume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.10.030
File:
PDF, 926 KB
english, 2010
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