Multiscale simulation for epitaxial silicon carbide growth...

Thin Solid Films 2010 Vol. 518; Iss. 6-supp-S1

Multiscale simulation for epitaxial silicon carbide growth by chlorides route

Maurizio Masi, Alessandro Fiorucci, Massimo Camarda, Antonino La Magna, Francesco La Via
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Volume:
518
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.tsf.2009.10.045
File:
PDF, 757 KB
english, 2010
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