Numerical studies of temperature profile and hydrodynamic phenomena during excimer laser assisted heteroepitaxial growth of patterned silicon and germanium bi-layers
J.C. Conde, S. Chiussi, E. Martín, F. Gontad, L. Fornarini, B. LeonVolume:
518
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.tsf.2009.10.074
File:
PDF, 852 KB
english, 2010