Heavy carbon atomic-layer doping at...

Thin Solid Films 2010 Vol. 518; Iss. 6-supp-S1

Heavy carbon atomic-layer doping at Si1 − xGex/Si heterointerface

Tomoya Hirano, Masao Sakuraba, Bernd Tillack, Junichi Murota
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Volume:
518
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.tsf.2009.10.093
File:
PDF, 846 KB
english, 2010
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