Formation processes of Ge3N4 films by radical nitridation...

Thin Solid Films 2010 Vol. 518; Iss. 6-supp-S1

Formation processes of Ge3N4 films by radical nitridation and their electrical properties

Kimihiko Kato, Hiroki Kondo, Mitsuo Sakashita, Shigeaki Zaima
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
518
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.tsf.2009.10.094
File:
PDF, 802 KB
english, 2010
Conversion to is in progress
Conversion to is failed