Impact of Si cap layer growth on surface segregation of P...

Thin Solid Films 2010 Vol. 518; Iss. 6-supp-S1

Impact of Si cap layer growth on surface segregation of P incorporated by atomic layer doping

Yohei Chiba, Masao Sakuraba, Bernd Tillack, Junichi Murota
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Volume:
518
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.tsf.2009.10.095
File:
PDF, 514 KB
english, 2010
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