Ellipsometric studies of N+ implanted Ti thin films

Thin Solid Films 2010 Vol. 518; Iss. 14

Ellipsometric studies of N+ implanted Ti thin films

S. Tripura Sundari, R. Krishnan, S. Dash
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Volume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.10.122
File:
PDF, 516 KB
english, 2010
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