The dry etching of a sol–gel deposited ZnO thin film in a...

Thin Solid Films 2010 Vol. 518; Iss. 10

The dry etching of a sol–gel deposited ZnO thin film in a high density BCl3/Ar plasma

Jong-Chang Woo, Doo-Seong Um, Chang-Il Kim
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.10.144
File:
PDF, 999 KB
english, 2010
Conversion to is in progress
Conversion to is failed