Effect of thermal annealing on the structural and...

Thin Solid Films 2010 Vol. 518; Iss. 10

Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition

Y. Awad, M.A. El Khakani, D. Brassard, R. Smirani, N. Camiré, M. Lessard, C. Aktik, M. Scarlete, J. Mouine
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Volume:
518
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2009.10.154
File:
PDF, 598 KB
english, 2010
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