Metal-oxide–semiconductor characteristics of thermally...

Thin Solid Films 2010 Vol. 518; Iss. 12

Metal-oxide–semiconductor characteristics of thermally grown nitrided SiO2 thin film on 4H-SiC in various N2O ambient

Kuan Yew Cheong, JeongHyun Moon, Hyeong Joon Kim, Wook Bahng, Nam-Kyun Kim
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2009.11.003
File:
PDF, 1.04 MB
english, 2010
Conversion to is in progress
Conversion to is failed