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Texture investigation in the trench depth direction of very fine copper wires less than 100 nm wide using electron backscatter diffraction
Khyoupin Khoo, Jin OnukiVolume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.11.022
File:
PDF, 349 KB
english, 2010