Physico-chemical, structural and physical properties of hydrogenated silicon oxinitride films elaborated by pulsed radiofrequency discharge
M. Bedjaoui, B. DespaxVolume:
518
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2009.11.068
File:
PDF, 1.22 MB
english, 2010