Growth and characterization of stoichiometric BCN films on...

Thin Solid Films 2010 Vol. 518; Iss. 15

Growth and characterization of stoichiometric BCN films on highly oriented pyrolytic graphite by radiofrequency plasma enhanced chemical vapor deposition

Md. Abdul Mannan, Hideyuki Noguchi, Tetsuya Kida, Masamitsu Nagano, Norie Hirao, Yuji Baba
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Volume:
518
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2009.11.086
File:
PDF, 1.22 MB
english, 2010
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