Wet etching rates of InGaZnO for the fabrication of transparent thin-film transistors on plastic substrates
Chi-Yuan Lee, Chienliu Chang, Wen-Pin Shih, Ching-Liang DaiVolume:
518
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2009.12.010
File:
PDF, 1.86 MB
english, 2010