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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Measurement of the Mechanical Stability of Semiconductor Line Structures in Relevant Media
Peter, Daniel, Dalmer, Michael, Kruwinus, Hans, Lechner, Alfred, Archer, Leo, Gaulhofer, Ernst, Gigler, Alexander M., Stark, Robert W., Bensch, WolfgangYear:
2009
Language:
english
DOI:
10.1149/1.3108349
File:
PDF, 466 KB
english, 2009