High quality ZnO films deposited by radio-frequency...

Thin Solid Films 2010 Vol. 518; Iss. 16

High quality ZnO films deposited by radio-frequency magnetron sputtering using layer by layer growth method

A.I. Ievtushenko, V.A. Karpyna, V.I. Lazorenko, G.V. Lashkarev, V.D. Khranovskyy, V.A. Baturin, O.Y. Karpenko, M.M. Lunika, K.A. Avramenko, V.V. Strelchuk, O.M. Kutsay
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Volume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.12.023
File:
PDF, 407 KB
english, 2010
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