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Growth of RuO2 thin films by liquid injection atomic layer deposition
K. Hušeková, E. Dobročka, A. Rosová, J. Šoltýs, A. Šatka, F. Fillot, K. FröhlichVolume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.12.063
File:
PDF, 852 KB
english, 2010