Studying the effect of temperature on the copper oxidation process using hydrogen peroxide for use in multi-step chemical mechanical planarization models
D. DeNardis, D. Rosales-Yeomans, L. Borucki, A. PhilipossianVolume:
518
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2009.12.089
File:
PDF, 641 KB
english, 2010