Design of Monolithic Differential Quartz Vibrating Beam...

Design of Monolithic Differential Quartz Vibrating Beam Accelerometer with Optimized Electrode Layout

Wang, Wen Pu, Zhou, Zhen, Feng, Li Shuang, Yao, Bao Yin, Yang, Gong Liu
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Volume:
562-565
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.562-565.322
Date:
July, 2013
File:
PDF, 951 KB
english, 2013
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