Design of Monolithic Differential Quartz Vibrating Beam Accelerometer with Optimized Electrode Layout
Wang, Wen Pu, Zhou, Zhen, Feng, Li Shuang, Yao, Bao Yin, Yang, Gong LiuVolume:
562-565
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.562-565.322
Date:
July, 2013
File:
PDF, 951 KB
english, 2013