Nanocone SiGe antireflective thin films fabricated by...

Thin Solid Films 2010 Vol. 518; Iss. 14

Nanocone SiGe antireflective thin films fabricated by ultrahigh-vacuum chemical vapor deposition with in situ annealing

Yuan-Ming Chang, Ching-Liang Dai, Tsung-Chieh Cheng, Che-Wei Hsu
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Volume:
518
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2009.12.105
File:
PDF, 832 KB
english, 2010
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