Directed evolution of α-grains in thin metastable-Al2O3 films deposited on Si(100) after post-deposition annealing
Sung Bo Lee, Chi Won Ahn, Sang-Hoon Lee, Eun Kyu Her, Kyu Hwan Oh, Doh-Yeon Kim, Dong Nyung LeeVolume:
518
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2010.01.011
File:
PDF, 4.25 MB
english, 2010