SiC Defect Density Reduction by Epitaxy on Porous Surfaces

Materials Science Forum 2001 Vol. 353-356

SiC Defect Density Reduction by Epitaxy on Porous Surfaces

Saddow, Stephen E., Mynbaeva, M.G., Choyke, W.J., Devaty, Robert P., Bai, Song, Melnychuck, Galyna, Koshka, Yaroslav, Dmitriev, Vladimir, Wood, C.E.C.
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Volume:
353-356
Year:
2001
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.353-356.115
File:
PDF, 432 KB
2001
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