Thermal stability of undoped polycrystalline silicon layers on antimony and boron-doped substrates
D. Lysáček, L. Válek, J. Spousta, T. Šikola, R. ŠpetíkVolume:
518
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2010.02.018
File:
PDF, 966 KB
english, 2010