Activation behavior of boron implanted poly-Si on glass substrate
M. Furuta, K. Shimamura, H. Tsubokawa, K. Tokushige, H. Furuta, T. HiraoVolume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.02.060
File:
PDF, 961 KB
english, 2010