Influence of working pressure on ZnO:Al films from tube...

Thin Solid Films 2010 Vol. 518; Iss. 17

Influence of working pressure on ZnO:Al films from tube targets for silicon thin film solar cells

H. Zhu, J. Hüpkes, E. Bunte, A. Gerber, S.M. Huang
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Volume:
518
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2010.02.065
File:
PDF, 1.04 MB
english, 2010
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