Time evolution of electronegativity in a pulsed inductively...

Thin Solid Films 2010 Vol. 518; Iss. 22

Time evolution of electronegativity in a pulsed inductively coupled oxygen plasma

Jeong-Beom Lee, Sang-Hun Seo, Hong-Young Chang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.02.076
File:
PDF, 743 KB
english, 2010
Conversion to is in progress
Conversion to is failed