Low-loss optical waveguides for the near ultra-violet and...

Thin Solid Films 2010 Vol. 518; Iss. 17

Low-loss optical waveguides for the near ultra-violet and visible spectral regions with Al2O3 thin films from atomic layer deposition

Mustafa M. Aslan, Nathan A. Webster, Courtney L. Byard, Marcelo B. Pereira, Colin M. Hayes, Rodrigo S. Wiederkehr, Sergio B. Mendes
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Volume:
518
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2010.03.011
File:
PDF, 317 KB
english, 2010
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