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Electron energy loss spectroscopy of nano-scale CrAlYN/CrN–CrAlY(O)N/Cr(O)N multilayer coatings deposited by unbalanced magnetron sputtering
I.M. Ross, W.M. Rainforth, C.R. Seabourne, A.J. Scott, P. Wang, B.G. Mendis, A.L. Bleloch, C. Reinhard, P.Eh. HovsepianVolume:
518
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2010.03.012
File:
PDF, 471 KB
english, 2010