Porous silicon oxide sacrificial layers deposited by pulsed-direct current magnetron sputtering for microelectromechanical systems
J. Olivares, M. Clement, S. González-Castilla, L. Vergara, E. Iborra, J. SangradorVolume:
518
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2010.03.013
File:
PDF, 398 KB
english, 2010