UV-enhanced atomic layer deposition of ZrO2 thin films at...

Thin Solid Films 2010 Vol. 518; Iss. 22

UV-enhanced atomic layer deposition of ZrO2 thin films at room temperature

Byoung H. Lee, Sangho Cho, Jae K. Hwang, Su H. Kim, Myung M. Sung
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Volume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.03.059
File:
PDF, 743 KB
english, 2010
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