Localized high-rate deposition of zinc oxide films at...

Thin Solid Films 2010 Vol. 518; Iss. 19

Localized high-rate deposition of zinc oxide films at atmospheric pressure using inductively coupled microplasma

Sven Stauss, Yasuo Imanishi, Hiroyuki Miyazoe, Kazuo Terashima
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Volume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.03.068
File:
PDF, 876 KB
english, 2010
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