Deep level transient spectroscopy on charge traps in high-k...

Thin Solid Films 2010 Vol. 518; Iss. 22

Deep level transient spectroscopy on charge traps in high-k ZrO2

Hua-Min Li, Gang Zhang, Won Jong Yoo
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Volume:
518
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2010.03.137
File:
PDF, 616 KB
english, 2010
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