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Reactive particle beam based deposition process of nano-crystalline silicon thin film at low temperature for the flexible AM-OLED backplane
Byoung-Cheol Song, Jin-Nyoung Jang, MunPyo Hong, Suk-Jae Yoo, Bon-Ju LeeVolume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.03.152
File:
PDF, 880 KB
english, 2010